592 / 2019-03-15 18:55:43
imulation Study on Super-Junction SiC MOSFET with Different PN Pillar Numbers
super-junction, MOSFET, SiC, Switching time
终稿
Xinyu Guo / Institute of Microelectronics of Chinese Academy of Sciences
Xiaoli Tian / Institute of Microelectronics of Chinese Academy of Sciences
Yun Bai / Institute of Microelectronics of Chinese Academy of Sciences
Tianmin Lei / School of Advanced Materials and Nano technology ,Xidian University
Zhonglin Han / Institute of Microelectronics of Chinese Academy of Sciences
Guan Song / Institute of Microelectronics of Chinese Academy of Sciences
The static characteristics and switching characteristics of traditional planar SiC MOSFET, common super-junction SiC MOSFET and super-junction SiC MOSFET with optimized PN pillar numbers are studied. The results show that the break voltage is 1710V and specific on-resistance is 4.862 mΩcm2 of super-junction SiC MOSFET with optimized PN pillar numbers. The static characteristic result indicates that increasing the number of PN pillar can effectively increase the breakdown voltage and reduce specific on-resistance. The super-junction SiC MOSFET has a smaller turn-off time than the traditional planer SiC MOSFET. When the doping concentration is 1e16 cm-3, the turn-on time is 8.41 ns, the turn-off time is 25.5 ns of super-junction SiC MOSFET with optimized PN pillar numbers. Moreover, the trade-off between the specific on-resistance and turn-off time is considered carefully in the design of super-junction SiC MOSFET.
重要日期
  • 会议日期

    06月12日

    2019

    06月14日

    2019

  • 06月12日 2019

    初稿截稿日期

  • 06月14日 2019

    注册截止日期

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