585 / 2019-03-15 16:12:42

Self-aligned top-gate amorphous oxide thin-film transistors with IZO/IGZO stacked active layer and Al reacted source/drain region

dual-channel thin-film transistors,aluminium reaction,source/drain series resistance

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In this work, self-aligned top-gate amorphous oxide semiconductor thin-film transistors with InZnO/InGaZnO (IZO/IGZO) stacked active layer and aluminum (Al) reacted source/drain region are investigated. The experimental results show the IZO layer helps with increasing mobility which is up to 22.4 cm2/V·s, and the IGZO layer modulates threshold voltage. The Al reacted source-drain region leads to a self-aligned device structure and ensures a low source/drain resistance which is low to 30.6 Ω·cm.