459 / 2019-02-27 20:02:51
A Path Optimization Compression Algorithm for Layout Partitioning in OPC
compression,layout,path planning,OPC
终稿
Hongji Wang / Tsinghua University
Chun Zhang / Tsinghua University
Xijin Zhao / Tsinghua University
Yuanhang Zhang / Tsinghua University
Wen Jia / Tsinghua University
Lihong Pi / Tsinghua University
Optimization of the path planning algorithms is an important direction in many research fields, such as robot and map. In this paper, a noval graph lossless compression method is presented for layout partitioning to shorten the time for path planning. This compression algorithm is designed for layout files, based on polygons in each layer of the layout. It can be loaded on various path search algorithms and optimization methods to find a path bypassing polygons between two points as a cutting line. The proposed algorithm not only improves the partition efficiency significantly, but also makes it easier to restore the layouts. Then the small irregular partitioned patterns can be used for next layout operation: Optical Proximity Correction(OPC).
重要日期
  • 会议日期

    06月12日

    2019

    06月14日

    2019

  • 06月12日 2019

    初稿截稿日期

  • 06月14日 2019

    注册截止日期

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