404 / 2019-02-04 13:06:00

Performance Enhanced a-Si:H TFTs for 8K Display by Adopting Corrosion Barrier Layer

A-Si:H thin film transistors (TFTs); contact resistance (RC); TLM

全体主题 > Display and Imager

A novel method of reducing the contact resistance (RC) is presented by adding a corrosion barrier layer between n+ a-Si and source/drain electrodes. The performance of novel TFTs is greatly improved by 35% and RC are effectively decreased from 17.43 Ω·m to 2.97 Ω·m.