Ti₃SiC₂, as a type of the MAX phase, possesses a unique nano-layered structure and exceptional amalgamation of metallic and ceramic, facilitating its potential application as a protective coating used in harsh high-temperature environment. However, the extremely narrow phase-forming region makes it difficult to prepare Ti₃SiC₂ MAX phase with high purity. In this study, the Ti₃SiC₂ MAX phase coatings on Ti-6Al-4V substrates were successfully synthesized through a two-step method involving High Power Impulse Magnetron Sputtering (HiPIMS) deposition followed by vacuum annealing at 850 °C for 90 min. The microstructural evolution of the coatings before and after annealing was meticulously examined, and the phase transition of the Ti-Si-C coating during annealing was comprehensively elucidated through X-ray diffraction (XRD) and differential scanning calorimetry (DSC) analyses. The crystallization pathway of Ti₃SiC₂ during annealing treatment comprises two stages: an initial stage starting from 550 °C, involving the formation of Ti₅Si₃ interphases, followed by a subsequent stage starting from 750 °C, transitioning to the Ti₃SiC₂ MAX phase. Additionally, the resulting Ti₃SiC₂ MAX phase coatings exhibited a remarkable hardness of 25.33 GPa and demonstrated significant corrosion resistance in a 3.5 wt.% NaCl solution, highlighting their potential for applications in demanding environments.

Ti3SiC2 coating,HiPIMS,Structural evolution,Mechanical property,Anti-corrosion