SF₆ is currently the most widely used insulating gas, but the GWP of SF₆ is extremely high and not easy to degrade, the use of SF₆/N₂ gas mixture can effectively reduce the use of SF₆ to reduce the impact of the greenhouse effect. Therefore, this paper carries out the corona discharge decomposition experiment of SF₆/N₂ under different micro water and micro oxygen content, and uses chromatography to detect the products and analyze the content, so as to obtain the effect of micro water and micro oxygen on the decomposition products. The experimental results show that: the main decomposition products of SF₆/N₂ gas mixture under corona discharge are SO₂F₂, SOF₂, SO₂, CO₂, CO and a small amount of NF₃, H₂S and N₂O; with the increase of micro-hydrogen, the decomposition of SO₂F₂ and SOF₂ will be promoted to increase the volume fraction of SO₂F₂ and SOF₂; with the increase of micro-oxygen, the decomposition of N₂O, SO₂, CO₂, and SO₂F₂ will be promoted to increase the volume fraction of SO₂F₂ and SO₂F₂ and the volume fraction of SO₂F₂ will be increased. With the increase of micro-oxygen, the decomposition of N₂O, SO₂, CO₂ and SO₂F₂ will be promoted, and the volume fraction of the products will be increased, and micro-oxygen and micro-water will not have a significant effect on the products with less content, such as NF₃, H₂S and N₂O, and the products of SO₂F₂, SOF₂, SO₂, and CO₂ will be increased with the increase of the discharging time. The experimental results of this paper can provide support for the fault diagnosis and monitoring of GIS corona discharge.