SF6 is currently the most widely used insulating gas, but the global warming potential of SF6 gas is very high and not easy to degrade, the use of gas mixtures containing SF6 such as SF6/N2 can effectively reduce the use of SF6 and thus reduce the impact of the greenhouse effect. Therefore, this paper carries out the corona discharge decomposition test of SF6/N2 under different contents of micro water and micro oxygen, detects the products and analyzes the contents of the products by chromatography, and derives the influence of micro water and micro oxygen on the decomposition products according to the decomposition products under different micro water and micro oxygen to provide support for the identification of the GIS discharge faults with SF6/N2 as the insulating gas by chemical diagnosis method. The experimental results show that the volume fractions of SOF2 and SO2F2 are obviously increased with the participation of micro-oxygen in water.