摘要详情

ID / 提交时间

179 / 2023-11-30 17:38:01

标题

Original cuts of quartz tuning fork for temperature sensor designed by image automatic generator

关键字

SAW temperature sensors,new cut,frequency temperature characteristics,integrated cut design generator

主题及专题

MEMS and Nano Sensors

状态

终稿

作者

Qizhou Wang / Xidian University

Ziyu Wang / Xidian University

Jing Zhu / Xidian University

Jialong Wang / Xidian University

Meng ZHAO / Xidian University

Jing JI / Xidian University

摘要

This paper analyzes the design concept of surface acoustic wave quartz temperature sensors, considering the selection of vibration modes and methods to improve sensitivity and reduce nonlinearity. This article introduces a quartz temperature sensor cut design generator for designing a quartz tuning fork surface acoustic wave temperature sensor, which can automatically calculate important parameters of the quartz sensor, thereby quickly obtaining theoretical results of various

parameters of any quartz cutting shape and presenting them in a visual manner. A new cutting YXwl design was proposed. It works best in flexural vibration mode. The cut has been proven to have good sensitivity and linearity.