摘要详情

ID / 提交时间

153 / 2023-09-29 17:03:42

标题

Design of A New Groove Structure of Quartz Tuning Fork with High Performance

关键字

quartz tuning fork, groove, voltage excitation efficiency, stress utilization efficiency, dynamic resistance, quality factor

主题及专题

MEMS and Nano Sensors

状态

终稿

作者

Jinxing Liang / Southeast University

Feihu Fang / Southeast University

Yilv Tao / Southeast University

Yi Wang / Southeast University

摘要

This paper presents a novel tuning fork with variable beam profile. In this structure, a quartz tuning fork resonator was designed. Variable cross-section grooves were set on the upper and lower surfaces of the tuning fork in view of the anisotropy of quartz, which improves the steepness of the groove's sidewalls, effectively improves the excitation electric field strength and the voltage excitation efficiency along the tuning fork, and reduces the value of the impedance of the resonator. By simulating and analyzing the tuning fork with three different cross-sections, the voltage excitation efficiency of the variable cross-section “H” shaped grooves was much larger than that of the other two cross-sections by about 64%, and the stress utilization efficiency along the length of the fork finger was also larger than that of the other two cross-sections. The resonant elements of the two cross-section shapes were fabricated on a standard three-inch wafer, and the test results showed that the quality factor of the variable cross-section "H" shaped groove was similar to that of the "H" shaped cross-section. However, the dynamic resistance decreases from 602.992 kΩ to 464.013 kΩ.