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High-speed measurement of Piezoelectric MEMS equivalent circuit parameters by Swept-sine and PRBS signals
编号：55 访问权限：公开 更新：2021-08-24 16:35:28 浏览：469次 口头报告

报告开始：2021年08月20日 11:50（Asia/Shanghai）

报告时间：20min

所在会场：[RS] Regular Paper Session [RS3] A4 Circuit Design and Evaluation with Emerging Technology

附属文件
摘要
We have developed a method of applying swept-sine signals to DUTs with the objective of achieving high-speed measurement of the equivalent-circuit parameters (four elements: Ls, Cs, Rs, and Cp) of piezoelectric MEMS(micro-electromechanical systems). Based on this development, we propose a solution that makes use of a PRBS (pseudo-random binary sequence) pattern that reduces test costs by utilizing an inexpensive digital-pin resource from among the measurement resources for ATE (automated test equipment).
 
关键词
MEMS;Piezoelectric MEMS;Piezoelectric oscillator;Swept-sine;PRBS
报告人
Mitsuo Matsumoto
Expert Engineer Advantest Corporation

Mr.Matsumoto is a expert engineer at ADVANTEST Corporation.
Specialty is developing application programs for measuring automotive semiconductor devices.
・ Measurement of piezoelectric MEMS by ATE
・ Measurement of minute current of 1pA or less by ATE
・ Measurement of minute capacitance of 1pF or less by ATE
・ Measurement of  automotive semiconductor devices by ATE
   (Many Pin Devices , Devices over 200 Pads on Wafer)

Previously, working on the development of ATE for automotive semiconductor measurement.

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重要日期

  • 会议日期

    08月18日

    2021

    至

    08月20日

    2021

  • 05月10日 2021

    初稿截稿日期

  • 08月16日 2021

    提前注册日期

  • 08月19日 2021

    报告提交截止日期

  • 08月20日 2021

    注册截止日期

主办单位
IEEE
Tongji University
Chinese Computer Federation
承办单位
Tongji University
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