A frequency multiplier amplification method based on the super-harmonic resonance of a coupled cantilever beam is studied for sensitivity of the sensor micro mass detection. The model of the coupled cantilever beams are established considering the couple vibration. The dynamic differential equation and boundary conditions of the coupled cantilever beams are deduced, and the dynamic equation is modally normalized. The multi-scale method is used to obtain the super-harmonic resonant amplitude frequency response equation of the high-frequency beam and the primary resonant amplitude frequency response equation of the low-frequency beam. The influence of damping, micro mass, external excitation and other factors on the super-harmonic resonance of the high-frequency beam and the primary resonance of the low-frequency beam is analyzed. The simulation results show that a small change for the detective micro mass adhere to the right end of the low-frequency beam can lead to a remarkable frequency change for the high-frequency beam. The research results can provide a theoretical basis and calculated method for improving the sensitivity of micro mass detection.

Coupling cantilever beam, Dynamics, Super harmonic resonance, Sensitivity