Abstract: The electrolyte concentration and discharge voltage are critical parameters of plasma electrolytic oxidation (PEO) technology. In this paper, PEO was employed to prepare a TiO2/SiO2 composite film on Ti foil by one-step process. The composite films with different SiO2 contents were obtained by adjusting the concentration of Na2SiO3 in the electrolyte and the discharge voltage. The composite films were used as the anode of the lithium-ion batteries (LIBs) and a Li foil was used as the counter electrode. The capacity, rate capability, cycling stability, cyclic voltammetry curves and electrochemical impedance spectra were measured by the battery test system and electrochemical workstation. The results showed that the capacity of the TiO2/SiO2 composite film anode prepared in the electrolyte with the mass ratio of KOH to Na2SiO3 of 1:6 at the discharge voltage of 450 V was about 200 mAh g-1 under a current density of 100 μA/cm2 after 100 cycles, while in the electrolyte with the KOH:Na2SiO3=1:9, the measured capacity can reach 400 mAh g-1. When the concentration of Na2SiO3 was increased to KOH:Na2SiO3=1:12, the discharge voltage was adjusted to 420 V accordingly, and the measured capacity was about 300 mAh g-1. The high capacity should be ascribed to the SiO2 generated by the decomposition of Na2SiO3, and TiO2 mainly played the role of supporting carrier to buffer the volume change of SiO2 during lithiation process. The high discharge voltage could promote the decomposition of Na2SiO3, so as to significantly increase the battery capacity. However, at the low discharge voltage, even if the concentration of Na2SiO3 was greatly increased, the capacity of the battery was improved with a limited extent. In addition, the three composite films showed the typical Li-TiO2 and Li-SiO2 redox peaks in the cyclic voltammograms. After cycling under a high current density of 800 μA/cm2, the composite films presented the reversible capacities with the good rate performance.