14 / 2021-06-22 09:09:14

Influence of substrate bias on structure and properties of CrN/AlCrN composite films deposited by magnetic field assisted enhancement multi-arc ion plating

Multi-arc ion plating;Magnetic field enhancement;Substrate bias;CrN/AlCrN composite films

CrN/AlCrN composite films prepared by multi-arc ion plating technology can combine the advantages of CrN and AlCrN thin films through nanoscale effect and structural modulation. Auxiliary magnetic field enhancement can increase the moving rate of arc spots and facilitate flexible strucure modulation. An inductance coil was installed behind the AlCr target to further enhance the magnetic field, and then the CrN/AlCrN composite films were deposited on the M2 HSS and 304 stainless steel samples by the magnetic field enhanced multi-arc ion plating technique.The effect of substrate bias on the microstructure and properties of CrN/AlCrN composite films was studied.The results show that the number of large particles on the surface of the film is significantly reduced compared with that without magnetic field enhancement.The composite films show a face-centered cubic structure and grows preferentially along the (111) crystal plane.What’s more,the microhardness increase with the increaseof negative bias，the maximum hardness reached about 2300HV.The composite films have good friction and wear property when the substrate bias is -180V.