The deposition process of particle on substrates was the main process in spraying, which was considered to be the result of plastic deformation and other related phenomena. This study reported the deposition processes of plasma sprayed Al2O3-40%TiO2 on different substrates (7075 aluminum alloy, 304 stainless steel, T2 red copper, and Q235 carbon steel), which were investigated by numerical and experimental methods. The research found that the maximum temperature and equivalent stress of the particles after the collision appeared at 304 stainless steel, reaching 550 K & 240 MPa, while the minimum value appeared at 7075 aluminum alloy, about 450 K & 180 MPa at 1500 ns. The equivalent stress shown a descending order of, 304 stainless steel, 7075 aluminum alloy, Q235 carbon steel and T2 red copper, which may be attributed to the descending order of the static yield strength of the four substrates. O element diffused obviously in 304 stainless steel and Q235 carbon steel substrates, Mg element had obviously diffused in coating during plasma spray process. The above research may provide a basis for engineering application in related fields.